Nanomachining of mesoscopic electronic devices using an atomic force microscope
Login
Services
Deutsch
English
About the Repository
Search and Browse
Publish
Home
→
Fakultäten
→
Fakultät für Mathematik und Physik
→
View Item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Original version
Schumacher, H.W.; Keyser, U.F.; Zeitler, U.; Haug, R.J.; Eberl, K.: Nanomachining of mesoscopic electronic devices using an atomic force microscope. In: Applied Physics Letters 75 (1999), Nr. 8, S. 1107-1109. DOI:
https://doi.org/10.1063/1.124611
Repository version
To cite the version in the repository, please use this identifier:
https://doi.org/10.15488/2826
Files in this item
Name:
Schumacher et al ...
Size:
331.6Kb
Format:
PDF
View/
Open
Abstract:
An atomic force microscope (AFM) is used to locally deplete the two-dimensional electron gas (2DEG) of a GaAs/AlGaAs heterostructure. The depletion is induced by repeated mechanical scribing of the surface layers of the heterostructure using the AFM tip. Measuring the room-temperature resistance across the scribed lines during fabrication provides in situ control of the depletion of the 2DEG. Variation of the room-temperature resistance of such lines tunes their low-temperature characteristics from tunneling up to insulating behavior. Using this technique, an in-plane-gate transistor and a single-electron transistor were fabricated. © 1999 American Institute of Physics.
License of this version:
Es gilt deutsches Urheberrecht. Das Dokument darf zum eigenen Gebrauch kostenfrei genutzt, aber nicht im Internet bereitgestellt oder an Außenstehende weitergegeben werden.
Publication type:
Article
Publishing status:
publishedVersion
Publication date:
1999
Keywords english:
AFM
,
2DEG
DDC:
530 | Physik
Usage Statistics
Show full item record
This item appears in the following Collection(s):
Fakultät für Mathematik und Physik
Frei zugängliche Publikationen aus der Fakultät für Mathematik und Physik
Search the repository
Search the repository
This Collection
Browse
All content
Communities & Collections
By Issue Date
Authors
Titles
Subjects
Subjects (GND)
DDC
License
Type
This Collection
By Issue Date
Authors
Titles
Subjects
Subjects (GND)
DDC
License
Type
My Account
Login
Register
Usage Statistics
of the Repository
of the Publication
of the Collection