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Originalpublikation
Malobabic, S.; Jupé, M.; Ristau, D.: Towards an electro-magnetic field separation of deposited material implemented in an ion beam sputter process. In: Applied Physics Letters 102 (2013), Nr. 22, 221604. DOI: https://doi.org/10.1063/1.4807793
Version im Repositorium
Zum Zitieren der Version im Repositorium verwenden Sie bitte diesen DOI:
https://doi.org/10.15488/4662
| Zusammenfassung: | |
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Nowadays, Ion Beam Sputter (IBS) processes are very well optimized on an empirical basis. To achieve further progresses, a modification of the IBS process by guiding the coating material using an axial magnetic field and an additional electrical field has been studied. The electro-magnetic (EM) field leads to a significant change in plasma properties and deposition rate distributions, whereas an increase in deposition rate along the centerline of the axial EM field around 150% was observed. These fundamental studies on the prototype are the basis for the development of an applicable and workable design of a separation device.
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| Lizenzbestimmungen: | CC BY 3.0 Unported - https://creativecommons.org/licenses/by/3.0/ |
| Publikationstyp: | Article |
| Publikationsstatus: | publishedVersion |
| Erstveröffentlichung: | 2013 |
| Schlagwörter (englisch): | Axial magnetic field, Deposited materials, Electrical field, Fundamental studies, Ion beam sputter, Plasma properties, Rate distributions, Separation devices, Deposition, Deposition rates, Ion beams, Separation |
| Fachliche Zuordnung (DDC): | 530 | Physik |
Die Publikation erscheint in Sammlung(en):
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An-Institute
Frei zugängliche Publikationen aus An-Instituten der Leibniz Universität Hannover