dc.identifier.uri |
http://dx.doi.org/10.15488/4662 |
|
dc.identifier.uri |
https://www.repo.uni-hannover.de/handle/123456789/4704 |
|
dc.contributor.author |
Malobabic, Sina
|
|
dc.contributor.author |
Jupé, Marco
|
|
dc.contributor.author |
Ristau, Detlev
|
|
dc.date.accessioned |
2019-03-28T12:29:35Z |
|
dc.date.available |
2019-03-28T12:29:35Z |
|
dc.date.issued |
2013 |
|
dc.identifier.citation |
Malobabic, S.; Jupé, M.; Ristau, D.: Towards an electro-magnetic field separation of deposited material implemented in an ion beam sputter process. In: Applied Physics Letters 102 (2013), Nr. 22, 221604. DOI: https://doi.org/10.1063/1.4807793 |
|
dc.description.abstract |
Nowadays, Ion Beam Sputter (IBS) processes are very well optimized on an empirical basis. To achieve further progresses, a modification of the IBS process by guiding the coating material using an axial magnetic field and an additional electrical field has been studied. The electro-magnetic (EM) field leads to a significant change in plasma properties and deposition rate distributions, whereas an increase in deposition rate along the centerline of the axial EM field around 150% was observed. These fundamental studies on the prototype are the basis for the development of an applicable and workable design of a separation device. |
eng |
dc.language.iso |
eng |
|
dc.publisher |
College Park, MD : American Institute of Physics |
|
dc.relation.ispartofseries |
Applied Physics Letters 102 (2013), Nr. 22 |
|
dc.rights |
CC BY 3.0 Unported |
|
dc.rights.uri |
https://creativecommons.org/licenses/by/3.0/ |
|
dc.subject |
Axial magnetic field |
eng |
dc.subject |
Deposited materials |
eng |
dc.subject |
Electrical field |
eng |
dc.subject |
Fundamental studies |
eng |
dc.subject |
Ion beam sputter |
eng |
dc.subject |
Plasma properties |
eng |
dc.subject |
Rate distributions |
eng |
dc.subject |
Separation devices |
eng |
dc.subject |
Deposition |
eng |
dc.subject |
Deposition rates |
eng |
dc.subject |
Ion beams |
eng |
dc.subject |
Separation |
eng |
dc.subject.ddc |
530 | Physik
|
ger |
dc.title |
Towards an electro-magnetic field separation of deposited material implemented in an ion beam sputter process |
|
dc.type |
Article |
|
dc.type |
Text |
|
dc.relation.issn |
0003-6951 |
|
dc.relation.doi |
https://doi.org/10.1063/1.4807793 |
|
dc.bibliographicCitation.issue |
22 |
|
dc.bibliographicCitation.volume |
102 |
|
dc.bibliographicCitation.firstPage |
221604 |
|
dc.description.version |
publishedVersion |
|
tib.accessRights |
frei zug�nglich |
|