Stress Reduction in Sputtered Thin NiFe 81/19 Layers for Magnetic Field Sensors

Show simple item record

dc.identifier.uri http://dx.doi.org/10.15488/3249
dc.identifier.uri http://www.repo.uni-hannover.de/handle/123456789/3279
dc.contributor.author Jogschies, L.
dc.contributor.author Rittinger, J.
dc.contributor.author Klaas, D.
dc.contributor.author Wurz, M.C.
dc.date.accessioned 2018-05-04T13:25:09Z
dc.date.available 2018-05-04T13:25:09Z
dc.date.issued 2016
dc.identifier.citation Jogschies, L.; Rittinger, J.; Klaas, D.; Wurz, M.C.: Stress Reduction in Sputtered Thin NiFe 81/19 Layers for Magnetic Field Sensors. In: Procedia Technology 26 (2016), S. 162-168. DOI: https://doi.org/10.1016/j.protcy.2016.08.022
dc.description.abstract Flexible magnetic field sensors using the anisotropic magnetoresistive effect that have been developed within the Collaborative Research Center 653 are to be transferred into industrial applications. Occurring challenges result from interactions between the flexible polyimide substrate and the functional layer namely a thin NiFe 81/19 film deposited by a DC sputter process. We have optimized the DC sputter process with regard to stress and roughness reduction. eng
dc.language.iso eng
dc.publisher Amsterdam : Elsevier
dc.relation.ispartofseries Procedia Technology 26
dc.rights CC BY-NC-ND 4.0 Unported
dc.rights.uri https://creativecommons.org/licenses/by-nc-nd/4.0/
dc.subject Flexible Substrate eng
dc.subject Collaborative Research Center 653 eng
dc.subject stress in metallic thin films eng
dc.subject.ddc 600 | Technik ger
dc.title Stress Reduction in Sputtered Thin NiFe 81/19 Layers for Magnetic Field Sensors eng
dc.type article
dc.type conferenceObject
dc.type Text
dc.relation.issn 2212-0173
dc.relation.doi https://doi.org/10.1016/j.protcy.2016.08.022
dc.bibliographicCitation.volume 26
dc.bibliographicCitation.firstPage 162
dc.bibliographicCitation.lastPage 168
dc.description.version publishedVersion
tib.accessRights frei zug�nglich


Files in this item

This item appears in the following Collection(s):

Show simple item record

 

Search the repository


Browse

My Account

Usage Statistics