Mathematical modelling and analysis of temperature effects in MEMS

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Würth, Tim: Mathematical modelling and analysis of temperature effects in MEMS. Hannover : Gottfried Wilhelm Leibniz Universität, Diss., 2019, 74 S. DOI:

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Sum total of downloads: 222

This thesis is concerned with the mathematical analysis of models for Micro-Electro-Mechanical Systems (MEMS). These models arise in the form of coupled partial differential equations with a moving boundary. Although MEMS devices are often operated in non-isothermal environments, temperature is usually neglected in the mathematical investigations. Therefore the focus of our modelling is to incorporate temperature and the related material properties. We derive two models, both of which focus on different aspects of the underlying physics. Afterwards we prove local well-posedness in time and also global well-posedness under additional assumptions on the model's parameters. Lastly, we provide some numerical results which exemplify how temperature and the model's material constants change the qualitative behaviour of the system.
License of this version: CC BY 3.0 DE
Document Type: doctoralThesis
Publishing status: publishedVersion
Issue Date: 2019
Appears in Collections:Fakultät für Mathematik und Physik

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pos. country downloads
total perc.
1 image of flag of Germany Germany 154 69.37%
2 image of flag of China China 15 6.76%
3 image of flag of United States United States 14 6.31%
4 image of flag of India India 9 4.05%
5 image of flag of Austria Austria 5 2.25%
6 image of flag of Taiwan Taiwan 3 1.35%
7 image of flag of Indonesia Indonesia 2 0.90%
8 image of flag of France France 2 0.90%
9 image of flag of Canada Canada 2 0.90%
10 image of flag of Bangladesh Bangladesh 2 0.90%
    other countries 14 6.31%

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