High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP)

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Obata, K.; El-Tamer, A.; Koch, L.; Hinze, U.; Chichkov, B.N.: High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP). In: Light: Science and Applications 2 (2013), e116. DOI: https://doi.org/10.1038/lsa.2013.72

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We developed a novel two-photon polymerization (2PP) configuration for fabrication of high-aspect three-dimensional (3D) structures, with an overall height larger than working distance of the microscope objective used for laser beam focusing into a photosensitive material. This method is based on a modified optical 2PP setup, where a microscope objective (100× high N.A.), immersion oil and cover glass can be moved together into the photosensitive material, resulting in an effective higher and wider objective working range (WOW-2PP). The proposed technique enables the fabrication of high-aspect structures with sub-micrometer process resolution. 3D structures with a height of 7mmare demonstrated, which could hardly be built with the conventional 2PP set-up due to refractive index mismatch and laser beam disturbances.
License of this version: CC BY-NC-SA 3.0 Unported
Document Type: article
Publishing status: publishedVersion
Issue Date: 2013
Appears in Collections:An-Institute

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1 image of flag of Germany Germany 39 73.58%
2 image of flag of United States United States 4 7.55%
3 image of flag of Hungary Hungary 2 3.77%
4 image of flag of France France 2 3.77%
5 image of flag of Czech Republic Czech Republic 2 3.77%
6 image of flag of Russian Federation Russian Federation 1 1.89%
7 image of flag of Korea, Republic of Korea, Republic of 1 1.89%
8 image of flag of Iran, Islamic Republic of Iran, Islamic Republic of 1 1.89%
9 image of flag of China China 1 1.89%

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