Obata, K.; El-Tamer, A.; Koch, L.; Hinze, U.; Chichkov, B.N.: High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP). In: Light: Science and Applications 2 (2013), e116. DOI: https://doi.org/10.1038/lsa.2013.72
Abstract: | |
We developed a novel two-photon polymerization (2PP) configuration for fabrication of high-aspect three-dimensional (3D) structures, with an overall height larger than working distance of the microscope objective used for laser beam focusing into a photosensitive material. This method is based on a modified optical 2PP setup, where a microscope objective (100× high N.A.), immersion oil and cover glass can be moved together into the photosensitive material, resulting in an effective higher and wider objective working range (WOW-2PP). The proposed technique enables the fabrication of high-aspect structures with sub-micrometer process resolution. 3D structures with a height of 7mmare demonstrated, which could hardly be built with the conventional 2PP set-up due to refractive index mismatch and laser beam disturbances. | |
License of this version: | CC BY-NC-SA 3.0 Unported |
Document Type: | Article |
Publishing status: | publishedVersion |
Issue Date: | 2013 |
Appears in Collections: | An-Institute |
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