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Download statistics - Document (COUNTER):
Jogschies, L.; Rittinger, J.; Klaas, D.; Wurz, M.C.: Stress Reduction in Sputtered Thin NiFe 81/19 Layers for Magnetic Field Sensors. In: Procedia Technology 26 (2016), S. 162-168. DOI: https://doi.org/10.1016/j.protcy.2016.08.022
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Selected time period:
Sum total of downloads: 1,946
| Abstract: | |
Flexible magnetic field sensors using the anisotropic magnetoresistive effect that have been developed within the Collaborative Research Center 653 are to be transferred into industrial applications. Occurring challenges result from interactions between the flexible polyimide substrate and the functional layer namely a thin NiFe 81/19 film deposited by a DC sputter process. We have optimized the DC sputter process with regard to stress and roughness reduction. | |
| License of this version: | CC BY-NC-ND 4.0 Unported |
| Document Type: | Article |
| Publishing status: | publishedVersion |
| Issue Date: | 2016 |
| Appears in Collections: | Fakultät für Maschinenbau |
distribution of downloads over the selected time period:
downloads by country:
| pos. | country | downloads | ||
|---|---|---|---|---|
| total | perc. | |||
| 1 |  |
Germany | 1,716 | 88.18% |
| 2 |  |
United States | 76 | 3.91% |
| 3 |  |
China | 54 | 2.77% |
| 4 |  |
Honduras | 11 | 0.57% |
| 5 |  |
United Kingdom | 8 | 0.41% |
| 6 |  |
Europe | 8 | 0.41% |
| 7 |  |
Russian Federation | 7 | 0.36% |
| 8 |  |
Netherlands | 6 | 0.31% |
| 9 |  |
Spain | 6 | 0.31% |
| 10 |  |
Austria | 6 | 0.31% |
| other countries | 48 | 2.47% | ||
Further download figures and rankings:
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