- Home
- →
- Fakultäten
- →
- Fakultät für Maschinenbau
- →
- View Item
Download statistics - Document (COUNTER):
Klaas, D.; Rein, M.; Wurz, M.C.; Rissing, L.: Development of a Humidity Sensor Element Based on Sputter-deposited thin ZnO-Layers. In: Procedia Technology 26 (2016), S. 27-34. DOI: https://doi.org/10.1016/j.protcy.2016.08.005
Repository version
Selected time period:
Sum total of downloads: 132
| Abstract: | |
A sensor concept for humidity measurement has been invented at the Institute of Micro Production Technology. The sensor element is manufactured on silicon oxide wafers with respect to the requirements of a new direct deposition process. This new process allows for thinner sensors with higher measuring accuracy. High purity 4N zinc oxide is used for the humidity sensing layer. Sensor properties and characteristics have been evaluated using X-ray diffraction and scanning electron microscopy. Finally, the evaluation electronic concept based on an embedded system with a field programmable gate array (FPGA) is presented. | |
| License of this version: | CC BY-NC-ND 4.0 Unported |
| Document Type: | Article |
| Publishing status: | publishedVersion |
| Issue Date: | 2016 |
| Appears in Collections: | Fakultät für Maschinenbau |
distribution of downloads over the selected time period:
downloads by country:
| pos. | country | downloads | ||
|---|---|---|---|---|
| total | perc. | |||
| 1 |  |
Germany | 67 | 50.76% |
| 2 |  |
United States | 33 | 25.00% |
| 3 |  |
China | 10 | 7.58% |
| 4 |  |
Indonesia | 3 | 2.27% |
| 5 |  |
France | 3 | 2.27% |
| 6 |  |
No geo information available | 2 | 1.52% |
| 7 |  |
Latvia | 2 | 1.52% |
| 8 |  |
United Kingdom | 2 | 1.52% |
| 9 |  |
Taiwan | 1 | 0.76% |
| 10 |  |
United Arab Emirates | 1 | 0.76% |
| other countries | 8 | 6.06% | ||
Further download figures and rankings:
Hinweis
Zur Erhebung der Downloadstatistiken kommen entsprechend dem „COUNTER Code of Practice for e-Resources“ international anerkannte Regeln und Normen zur Anwendung. COUNTER ist eine internationale Non-Profit-Organisation, in der Bibliotheksverbände, Datenbankanbieter und Verlage gemeinsam an Standards zur Erhebung, Speicherung und Verarbeitung von Nutzungsdaten elektronischer Ressourcen arbeiten, welche so Objektivität und Vergleichbarkeit gewährleisten sollen. Es werden hierbei ausschließlich Zugriffe auf die entsprechenden Volltexte ausgewertet, keine Aufrufe der Website an sich.