Component Integrated Sensors: Deposition of Thin Insulation Layers on Functional Surfaces

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Klaas, D.; Taptimthong, P.; Jogschies, L.; Rissing, L.: Component Integrated Sensors: Deposition of Thin Insulation Layers on Functional Surfaces. In: Procedia Technology 15 (2014), S. 114-121. DOI:

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Sum total of downloads: 30

To guarantee the deposition of sensors on functional surfaces, a reliable thin insulation layer is required. Within this paper, the results of the investigation of a capable insulation layer are presented. Challenges occurring during the manufacturing process will be discussed. A focus is set on parameters that influence the breakdown field strength. The influence of the surface roughness on the quality of the produced layers will be discussed as well. Differences between layers deposited on stainless steel and on aluminium will be mentioned.
License of this version: CC BY-NC-ND 3.0
Document Type: article
Publishing status: publishedVersion
Issue Date: 2014
Appears in Collections:Fakultät für Maschinenbau

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pos. country downloads
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1 image of flag of Germany Germany 22 73.33%
2 image of flag of United States United States 3 10.00%
3 image of flag of Spain Spain 3 10.00%
4 image of flag of Brazil Brazil 1 3.33%
5 image of flag of United Arab Emirates United Arab Emirates 1 3.33%

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