Component Integrated Sensors: Deposition of Thin Insulation Layers on Functional Surfaces

Abstract

To guarantee the deposition of sensors on functional surfaces, a reliable thin insulation layer is required. Within this paper, the results of the investigation of a capable insulation layer are presented. Challenges occurring during the manufacturing process will be discussed. A focus is set on parameters that influence the breakdown field strength. The influence of the surface roughness on the quality of the produced layers will be discussed as well. Differences between layers deposited on stainless steel and on aluminium will be mentioned.