Steckenreiter, Verena; Hensen, Jan; Knorr, Alwina; Niepelt, Raphael; Brendel, Rolf; Kajari-Schröder, Sarah
(London : Elsevier Ltd., 2016)
We combine two kerfless approaches to unite advantages of both processes: the epitaxial layer transfer based on porous silicon (PSI process) and the lift-off of a thin silicon layer from a substrate via controlled spalling ...