Fabrication of polymer based integrated photonic devices by maskless lithography

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dc.identifier.uri http://dx.doi.org/10.15488/1759
dc.identifier.uri http://www.repo.uni-hannover.de/handle/123456789/1784
dc.contributor.author Rahlves, Maik
dc.contributor.editor Tabor, Christopher E.
dc.contributor.editor Kajzar, François
dc.contributor.editor Kaino, Toshikuni
dc.contributor.editor Koike, Yasuhiro
dc.date.accessioned 2017-08-08T08:49:50Z
dc.date.available 2017-08-08T08:49:50Z
dc.date.issued 2016
dc.identifier.citation Rahlves, M.: Fabrication of polymer based integrated photonic devices by maskless lithography. In: Proceedings of SPIE - The International Society for Optical Engineering 9745 (2016), 97450D. DOI: https://doi.org/10.1117/12.2213211
dc.description.abstract We present our recent results on the fabrication of photonic devices such as single-mode and few-mode waveguides, Ycouplers as well as integrated interferometric sensor devices. The devices were created by means of a fabrication method based on maskless lithography, which allows for fabricating embedded integrated polymer elements on a scale of several square centimeters with a resolution down to one micron. We demonstrate the versatility of our approach by presenting first results on photonic structures created by maskless lithography. © 2016 SPIE. eng
dc.description.sponsorship DFG/SFB/TRR 123
dc.language.iso eng
dc.publisher Bellingham, WA : S P I E - International Society for Optical Engineering
dc.relation.ispartof Organic Photonic Materials and Devices XVIII : 15-17 February 2016, San Francisco, California, United States
dc.relation.ispartofseries Proceedings of SPIE 9745 (2016)
dc.rights Es gilt deutsches Urheberrecht. Das Dokument darf zum eigenen Gebrauch kostenfrei genutzt, aber nicht im Internet bereitgestellt oder an Außenstehende weitergegeben werden. Dieser Beitrag ist aufgrund einer (DFG-geförderten) Allianz- bzw. Nationallizenz frei zugänglich.
dc.subject Integrated photonics eng
dc.subject Maskless lithography eng
dc.subject Polymer photonics eng
dc.subject Waveguides eng
dc.subject Fabrication eng
dc.subject Lithography eng
dc.subject Photonics eng
dc.subject Polymers eng
dc.subject Waveguides eng
dc.subject Fabrication method eng
dc.subject Integrated photonic devices eng
dc.subject Integrated photonics eng
dc.subject Integrated polymers eng
dc.subject Interferometric sensor eng
dc.subject Mask-less lithography eng
dc.subject Photonic structure eng
dc.subject Polymer photonics eng
dc.subject Photonic devices eng
dc.subject.classification Konferenzschrift ger
dc.subject.ddc 530 | Physik ger
dc.title Fabrication of polymer based integrated photonic devices by maskless lithography
dc.type BookPart
dc.type Text
dc.relation.essn 1996-756X
dc.relation.isbn 978-1-62841-980-1
dc.relation.issn 0277-786X
dc.relation.doi https://doi.org/10.1117/12.2213211
dc.bibliographicCitation.volume 9745
dc.bibliographicCitation.firstPage 97450D
dc.description.version publishedVersion
tib.accessRights frei zug�nglich


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