Rathmann, Sven; Raatz, Annika; Hesselbach, Jürgen
(Bedford : Euspen (European Society for Precision Engineering and Nanotechnology), 2008)
Nowadays, the production of 3D MEMS and MOEMS is carried out by using hybrid integration of single components, for which batch production is normally preferred. In this field, adhesive technology is one of the major joining ...