Malobabic, S.; Jupé, M.; Ristau, D.: Towards an electro-magnetic field separation of deposited material implemented in an ion beam sputter process. In: Applied Physics Letters 102 (2013), Nr. 22, 221604. DOI:
https://doi.org/10.1063/1.4807793
Zusammenfassung: |
Nowadays, Ion Beam Sputter (IBS) processes are very well optimized on an empirical basis. To achieve further progresses, a modification of the IBS process by guiding the coating material using an axial magnetic field and an additional electrical field has been studied. The electro-magnetic (EM) field leads to a significant change in plasma properties and deposition rate distributions, whereas an increase in deposition rate along the centerline of the axial EM field around 150% was observed. These fundamental studies on the prototype are the basis for the development of an applicable and workable design of a separation device.
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Lizenzbestimmungen: |
CC BY 3.0 Unported - https://creativecommons.org/licenses/by/3.0/
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Publikationstyp: |
Article |
Publikationsstatus: |
publishedVersion |
Erstveröffentlichung: |
2013 |
Schlagwörter (englisch): |
Axial magnetic field, Deposited materials, Electrical field, Fundamental studies, Ion beam sputter, Plasma properties, Rate distributions, Separation devices, Deposition, Deposition rates, Ion beams, Separation
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Fachliche Zuordnung (DDC): |
530 | Physik
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