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Showing 1 out of a total of 1 results for collection: Fakultät für Mathematik und Physik. (0.005 seconds)

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Effective passivation of crystalline silicon surfaces by ultrathin atomic-layer-deposited TiOx layers

Titova, V.; Veith-Wolf, B.; Startsev, D.; Schmidt, J. (London : Elsevier Ltd., 2017)

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- atomic layer deposition (1)
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