Thermodynamic investigations on the laser ablation rate of silicon over five fluence decades

Show simple item record

dc.identifier.uri http://dx.doi.org/10.15488/4660
dc.identifier.uri https://www.repo.uni-hannover.de/handle/123456789/4702
dc.contributor.author Schütz, V.
dc.contributor.author Stute, U.
dc.contributor.author Horn, A.
dc.date.accessioned 2019-03-28T12:29:34Z
dc.date.available 2019-03-28T12:29:34Z
dc.date.issued 2013
dc.identifier.citation Schütz, V.; Stute, U.; Horn, A.: Thermodynamic investigations on the laser ablation rate of silicon over five fluence decades. In: Physics Procedia 41 (2013), S. 640-649. DOI: https://doi.org/10.1016/j.phpro.2013.03.128
dc.description.abstract Laser ablation of silicon is investigated with a large set of laser parameters to determine the ablation rate over five laser fluence decades. A thermodynamic model approach for the ablation of silicon has been derived. This simplified model determines the achievable ablation depth per pulse as a function of the applied laser fluence ranging from femtosecond to microsecond laser pulse duration. Furthermore different laser wavelengths from near-infrared to ultra-violet are investigated to determine the dependence on the optical penetration depth and on the ablation efficiency. The measured ablation depth per pulse is in agreement to the models predictions with the restrictions made. eng
dc.language.iso eng
dc.publisher Amsterdam : Elsevier B.V.
dc.relation.ispartof 7th International WLT Conference on Lasers in Manufacturing, LiM 2013, May 13-16, 2013, Munich, Germany
dc.relation.ispartofseries Physics Procedia 41 (2013)
dc.rights CC BY-NC-ND 3.0 Unported
dc.rights.uri https://creativecommons.org/licenses/by-nc-nd/3.0/
dc.subject Laser ablation eng
dc.subject Silicon eng
dc.subject Thermodynamics eng
dc.subject.ddc 530 | Physik ger
dc.title Thermodynamic investigations on the laser ablation rate of silicon over five fluence decades
dc.type article
dc.type conferenceObject
dc.type Text
dc.relation.issn 1875-3884
dc.relation.doi https://doi.org/10.1016/j.phpro.2013.03.128
dc.bibliographicCitation.volume 41
dc.bibliographicCitation.firstPage 640
dc.bibliographicCitation.lastPage 649
dc.description.version publishedVersion
tib.accessRights frei zug�nglich


Files in this item

This item appears in the following Collection(s):

  • An-Institute
    Frei zugängliche Publikationen aus An-Instituten der Leibniz Universität Hannover

Show simple item record

 

Search the repository


Browse

My Account

Usage Statistics