Development of a Humidity Sensor Element Based on Sputter-deposited thin ZnO-Layers

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dc.identifier.uri http://dx.doi.org/10.15488/3244
dc.identifier.uri http://www.repo.uni-hannover.de/handle/123456789/3274
dc.contributor.author Klaas, D.
dc.contributor.author Rein, M.
dc.contributor.author Wurz, M.C.
dc.contributor.author Rissing, L.
dc.date.accessioned 2018-05-04T13:25:07Z
dc.date.available 2018-05-04T13:25:07Z
dc.date.issued 2016
dc.identifier.citation Klaas, D.; Rein, M.; Wurz, M.C.; Rissing, L.: Development of a Humidity Sensor Element Based on Sputter-deposited thin ZnO-Layers. In: Procedia Technology 26 (2016), S. 27-34. DOI: https://doi.org/10.1016/j.protcy.2016.08.005
dc.description.abstract A sensor concept for humidity measurement has been invented at the Institute of Micro Production Technology. The sensor element is manufactured on silicon oxide wafers with respect to the requirements of a new direct deposition process. This new process allows for thinner sensors with higher measuring accuracy. High purity 4N zinc oxide is used for the humidity sensing layer. Sensor properties and characteristics have been evaluated using X-ray diffraction and scanning electron microscopy. Finally, the evaluation electronic concept based on an embedded system with a field programmable gate array (FPGA) is presented. eng
dc.language.iso eng
dc.publisher Amsterdam : Elsevier
dc.relation.ispartofseries Procedia Technology 26
dc.rights CC BY-NC-ND 4.0 Unported
dc.rights.uri https://creativecommons.org/licenses/by-nc-nd/4.0/
dc.subject humidity sensor eng
dc.subject direct deposition eng
dc.subject zinc oxide eng
dc.subject ZnO eng
dc.subject Collaborative Research Center 653 eng
dc.subject.classification Konferenzschrift ger
dc.subject.ddc 600 | Technik ger
dc.title Development of a Humidity Sensor Element Based on Sputter-deposited thin ZnO-Layers eng
dc.type article
dc.type Text
dc.relation.issn 2212-0173
dc.relation.doi https://doi.org/10.1016/j.protcy.2016.08.005
dc.bibliographicCitation.volume 26
dc.bibliographicCitation.firstPage 27
dc.bibliographicCitation.lastPage 34
dc.description.version publishedVersion
tib.accessRights frei zug�nglich


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