Component Integrated Sensors: Deposition of Thin Insulation Layers on Functional Surfaces

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dc.identifier.uri http://dx.doi.org/10.15488/3206
dc.identifier.uri http://www.repo.uni-hannover.de/handle/123456789/3236
dc.contributor.author Klaas, D.
dc.contributor.author Taptimthong, P.
dc.contributor.author Jogschies, L.
dc.contributor.author Rissing, L.
dc.date.accessioned 2018-05-04T12:29:18Z
dc.date.available 2018-05-04T12:29:18Z
dc.date.issued 2014
dc.identifier.citation Klaas, D.; Taptimthong, P.; Jogschies, L.; Rissing, L.: Component Integrated Sensors: Deposition of Thin Insulation Layers on Functional Surfaces. In: Procedia Technology 15 (2014), S. 114-121. DOI: https://doi.org/10.1016/j.protcy.2014.09.062
dc.description.abstract To guarantee the deposition of sensors on functional surfaces, a reliable thin insulation layer is required. Within this paper, the results of the investigation of a capable insulation layer are presented. Challenges occurring during the manufacturing process will be discussed. A focus is set on parameters that influence the breakdown field strength. The influence of the surface roughness on the quality of the produced layers will be discussed as well. Differences between layers deposited on stainless steel and on aluminium will be mentioned. eng
dc.language.iso eng
dc.publisher Amsterdam : Elsevier
dc.relation.ispartofseries Procedia Technology 15
dc.rights CC BY-NC-ND 3.0
dc.rights.uri https://creativecommons.org/licenses/by-nc-nd/3.0/
dc.subject Sensor eng
dc.subject Insulation layer eng
dc.subject Gentelligent eng
dc.subject Dialuminiumtrioxid eng
dc.subject AI2O3 eng
dc.subject Collaborative Research Center 653 eng
dc.subject.ddc 600 | Technik ger
dc.title Component Integrated Sensors: Deposition of Thin Insulation Layers on Functional Surfaces
dc.type article
dc.type conferenceObject
dc.type Text
dc.relation.issn 2212-0173
dc.relation.doi https://doi.org/10.1016/j.protcy.2014.09.062
dc.bibliographicCitation.volume 15
dc.bibliographicCitation.firstPage 114
dc.bibliographicCitation.lastPage 121
dc.description.version publishedVersion
tib.accessRights frei zug�nglich


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