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Original version
Rittinger, J.; Taptimthong, P.; Jogschies, L.; Wurz, M.C.; Rissing, L.: Impact of different polyimide-based substrates on the soft magnetic properties of NiFe thin films. In: Proceedings of SPIE - The International Society for Optical Engineering 9517 (2015), 95171R. DOI: https://doi.org/10.1117/12.2178765
Repository version
To cite the version in the repository, please use this identifier:
https://doi.org/10.15488/1765
Files in this item
| Abstract: | |
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We investigated the impact of polymer substrates on the magnetic properties of soft magnetic thin films. Experiments were carried out to evaluate the performance of AMR (anisotropic magnetoresistive) sensors deposited on polymeric substrates and to give indications for the design of future sensors on flexible substrates. Sputtered permalloy (NiFe 81/19) was used as a soft magnetic thin film layer. As substrate materials, liquid polyimide precursors and DuPont Kapton® HN foil were examined. Surface roughness was determined for each substrate material. The dynamic of soft magnetic behavior of the permalloy thin films was observed in a homogenous alternating magnetic field. Resulting R-Hcurves were evaluated in regard to the magnitude of the magnetoresistive effect (ΔR / R0-ratio), as well as the resulting magnetic anisotropy of the tested samples. B-H-curves were obtained by means of a vibrating sample magnetometer (VSM). © 2015 COPYRIGHT SPIE.
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| License of this version: | Es gilt deutsches Urheberrecht. Das Dokument darf zum eigenen Gebrauch kostenfrei genutzt, aber nicht im Internet bereitgestellt oder an Außenstehende weitergegeben werden. Dieser Beitrag ist aufgrund einer (DFG-geförderten) Allianz- bzw. Nationallizenz frei zugänglich. |
| Publication type: | Article |
| Publishing status: | publishedVersion |
| Publication date: | 2015 |
| Keywords english: | Flexible substrates, Magnetoresistive devices, Permalloy, Polyimides, Actuators, Anisotropy, Embedded systems, Magnetic anisotropy, Magnetic devices, Magnetic properties, Magnetic thin films, Magnetism, Nickel alloys, Polyimides, Polymer films, Polymers, Smart sensors, Surface roughness, Thin films, Alternating magnetic field, Flexible substrate, Magneto-resistive effect, Magnetoresistive devices, Permalloy, Soft magnetic properties, Soft magnetic thin films, Vibrating sample magnetometer, Substrates |
| DDC: | 530 | Physik |
| Controlled keywords(GND): | Konferenzschrift |
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Fakultät für Maschinenbau
Frei zugängliche Publikationen aus der Fakultät für Maschinenbau