Automated Assembly of Hybrid Microsystems
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Date
2007
Volume
2
Issue
Journal
Series Titel
Book Title
Proceedings of the 7th international conference / European Society for Precision Engineering and Nanotechnology : May 20th - May 24th 2007, Bremen, Germany, Vol. 2
Publisher
Bedford : Euspen (European Society for Precision Engineering and Nanotechnology)
Link to publishers version
Abstract
The paper describes the design of a system for the automated assembly of hybrid microsystems and the accuracies of the components. The influences on the accuracy will be analyzed on the basis of an example for an automated assembly process. While the object sizes reach centimeter range, they have to be assembled with an assembly accuracy of only a few micrometers. A relative positioning accuracy of 0.8 pm is reached in this process.
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License
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