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Original version
Schöttler, K.; Rathmann, S.; Raatz, A.; Hesselbach, J.: Automated Assembly of Hybrid Microsystems. In: Thornett, E. (Ed.): Proceedings of the 7th international conference / European Society for Precision Engineering and Nanotechnology : May 20th - May 24th 2007, Bremen, Germany, Vol. 2. Bedford : Euspen (European Society for Precision Engineering and Nanotechnology), 2007, S. 364-367
Repository version
To cite the version in the repository, please use this identifier:
https://doi.org/10.15488/13313
Files in this item
| Abstract: | |
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The paper describes the design of a system for the automated assembly of hybrid
microsystems and the accuracies of the components. The influences on the accuracy
will be analyzed on the basis of an example for an automated assembly process.
While the object sizes reach centimeter range, they have to be assembled with an
assembly accuracy of only a few micrometers. A relative positioning accuracy of
0.8 pm is reached in this process.
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| License of this version: | Es gilt deutsches Urheberrecht. Das Dokument darf zum eigenen Gebrauch kostenfrei genutzt, aber nicht im Internet bereitgestellt oder an Außenstehende weitergegeben werden. |
| Publication type: | BookPart |
| Publishing status: | publishedVersion |
| Publication date: | 2007 |
| Keywords german: | Konferenzschrift, Feinwerktechnik, Mikrosystemtechnik, Nanotechnologie |
| DDC: | 620 | Ingenieurwissenschaften und Maschinenbau |
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Fakultät für Maschinenbau
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