Nowadays, an ongoing trend of miniaturization of products and components can be
observed in nearly all application areas in the world. As for microsystems, a
distinction is drawn between monolithic and hybrid microsystems. The latter group
requires some kind of assembly process. For the assembly of hybrid microsystems, a
high assembly accuracy in the range of a few micrometers is required. In order to
reach this accuracy, an assembly system for sensor guided microassembly has been
developed at the Collaborative Research Centre 516 “Design and manufacturing of
active micro systems”. This paper describes the design of a system for automated
assembly of hybrid microsystems. The influences on the accuracy will be analyzed
on the basis of an example for an automated assembly process.
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