Prediction of a double-antireflection coating made solely with SiN x in a single, directional deposition step

Abstract

Silicon solar cell modules, where the EVA layer is replaced by an air gap, are able to produce the same electric power as standard modules with EVA only if their anti-reflective properties are enhanced. We propose a method to do this by exploiting the fact that, on Si surfaces textured with random pyramids, light incident from near normal angle always hits at least two pyramidal faces before being reflected back toward the sun. If these two faces are covered with an anti-reflective coating (ARC) made of one and the same material but with two different thicknesses, the coating acts as a double ARC. Such a coating can be produced by depositing the SiNx layer from an oblique angle, optimally from 14.7°. Our detailed raytracing analysis predicts that J sc can then be improved by 0.2 mA/cm2 for normal incident sunlight and AM1.5g standard illumination, and is improved for all angles within a cone with an apex angle of approximately 64°. Furthermore, the coating can be optimized for modules in vertical mounting, where a Jsc gain of 0.1 mA/cm2 is predicted for an angle of incidence of 40°.