Abstract Terrestrial laser scanning is used in many disciplines of engineering. Examples include mobile mapping, architecture surveying, archaeology, as well as monitoring and surveillance measurements. For most of the mentioned applications, 3D object capturing in an accuracy range of several millimeters up to a few centimeters is sufficient. However, in engineering geodesy, particularly in industrial surveying or monitoring measurements, accuracies in a range of a few millimeters are required. Additional increased quality requirements apply to these applications. This paper focuses on the quality investigation of data captured with static and kinematic terrestrial laser scanning. For this purpose, suitable sensors, which are typically used in the approach of a multi-sensor-system, as well as the corresponding data capturing/acquisition strategies, are presented. The aim of such systems is a geometry- and surface-based analysis in an industrial environment with an accuracy of +/- 1-2 mm or better.