This article presents a technical concept and machining possibilities for milling of micro structures with a fast tool servo (FTS). The tool is capable of tool tip displacements with a variable frequency up to 4000 Hz and an amplitude up to 30 μm. The control system of the actuator is linked to the angular spindle position, allowing to freely manipulate the excitation signal. Combining this tool system with a single tooth face milling head, micro structures on flat surfaces can be generated on conventional milling centers. Selected micro structures are machined and evaluated in terms of precision and surface quality.