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Download statistics - Document (COUNTER):
Malobabic, S.; Jupé, M.; Ristau, D.: Towards an electro-magnetic field separation of deposited material implemented in an ion beam sputter process. In: Applied Physics Letters 102 (2013), Nr. 22, 221604. DOI: https://doi.org/10.1063/1.4807793
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Selected time period:
Sum total of downloads: 119
| Abstract: | |
Nowadays, Ion Beam Sputter (IBS) processes are very well optimized on an empirical basis. To achieve further progresses, a modification of the IBS process by guiding the coating material using an axial magnetic field and an additional electrical field has been studied. The electro-magnetic (EM) field leads to a significant change in plasma properties and deposition rate distributions, whereas an increase in deposition rate along the centerline of the axial EM field around 150% was observed. These fundamental studies on the prototype are the basis for the development of an applicable and workable design of a separation device. | |
| License of this version: | CC BY 3.0 Unported |
| Document Type: | Article |
| Publishing status: | publishedVersion |
| Issue Date: | 2013 |
| Appears in Collections: | An-Institute |
distribution of downloads over the selected time period:
downloads by country:
| pos. | country | downloads | ||
|---|---|---|---|---|
| total | perc. | |||
| 1 |  |
Germany | 79 | 66.39% |
| 2 |  |
United States | 17 | 14.29% |
| 3 |  |
China | 8 | 6.72% |
| 4 |  |
Korea, Republic of | 4 | 3.36% |
| 5 |  |
Canada | 3 | 2.52% |
| 6 |  |
Russian Federation | 2 | 1.68% |
| 7 |  |
France | 2 | 1.68% |
| 8 |  |
Sweden | 1 | 0.84% |
| 9 |  |
Japan | 1 | 0.84% |
| 10 |  |
Indonesia | 1 | 0.84% |
| other countries | 1 | 0.84% | ||
Further download figures and rankings:
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