Thermodynamic investigations on the laser ablation rate of silicon over five fluence decades

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Schütz, V.; Stute, U.; Horn, A.: Thermodynamic investigations on the laser ablation rate of silicon over five fluence decades. In: Physics Procedia 41 (2013), S. 640-649. DOI: https://doi.org/10.1016/j.phpro.2013.03.128

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Abstract: 
Laser ablation of silicon is investigated with a large set of laser parameters to determine the ablation rate over five laser fluence decades. A thermodynamic model approach for the ablation of silicon has been derived. This simplified model determines the achievable ablation depth per pulse as a function of the applied laser fluence ranging from femtosecond to microsecond laser pulse duration. Furthermore different laser wavelengths from near-infrared to ultra-violet are investigated to determine the dependence on the optical penetration depth and on the ablation efficiency. The measured ablation depth per pulse is in agreement to the models predictions with the restrictions made.
License of this version: CC BY-NC-ND 3.0 Unported
Document Type: article
Publishing status: publishedVersion
Issue Date: 2013
Appears in Collections:An-Institute

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1 image of flag of Germany Germany 39 76.47%
2 image of flag of United States United States 3 5.88%
3 image of flag of Netherlands Netherlands 2 3.92%
4 image of flag of France France 2 3.92%
5 image of flag of China China 2 3.92%
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