Atmospheric components and dopant carry-over influence during laser ablation

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Schütz, V.; Haupt, O.; Stute, U.: Atmospheric components and dopant carry-over influence during laser ablation. In: Energy Procedia 8 (2011), S. 360-364. DOI: https://doi.org/10.1016/j.egypro.2011.06.150

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Abstract: 
In order to improve the efficiency of multi-crystalline (mc)-silicon solar cells, laser ablation as a non-contact tool is highly suitable for various processes. Apart from the laser and scanning parameters frequently reported in the literature, other factors exist upon which the observable results of laser ablation depend. In addition to laser and scanning parameters, the influence of various atmospheres on the laser ablation process is investigated in this work. The laser edge isolation process is used to demonstrate these effects. The impact on the dopant concentration in the generated laser groove is investigated using the shunt resistance of the solar cells. From these investigations the most suitable laser is determined as well as ambient parameters for the ablation of mc-silicon.
License of this version: CC BY-NC-ND 3.0 Unported
Document Type: article
Publishing status: publishedVersion
Issue Date: 2011
Appears in Collections:An-Institute

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pos. country downloads
total perc.
1 image of flag of Germany Germany 199 83.97%
2 image of flag of United States United States 21 8.86%
3 image of flag of China China 6 2.53%
4 image of flag of Hong Kong Hong Kong 3 1.27%
5 image of flag of Czech Republic Czech Republic 3 1.27%
6 image of flag of Russian Federation Russian Federation 2 0.84%
7 image of flag of Israel Israel 1 0.42%
8 image of flag of France France 1 0.42%
9 image of flag of Spain Spain 1 0.42%

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