Hierarchical Etching for Improved Optical Front-side Properties of Monocrystalline Si Solar Cells

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Heinemeyer, F.; Steckenreiter, V.; Kiefer, F.; Peibst, R.: Hierarchical Etching for Improved Optical Front-side Properties of Monocrystalline Si Solar Cells. In: Energy Procedia 77 (2015), S. 810-815. DOI: https://doi.org/10.1016/j.egypro.2015.07.114

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We investigate a hierarchical surface structuring process to reduce the optical reflectance of monocrystalline Si solar cells to below the reflectance of state-of-the-art alkaline texturing. First, alkaline texturing is performed, yielding random pyramids with a few micrometers in size. Second, plasma etching forms step-shaped structures smaller than the wavelength of visible light. Eventually, the surface morphology is formed by <111> planes with many steps, edges and inverted pyramids in a few hundreds of nanometers scale. We investigate the reflectance on double-side textured samples with SiNx/Al2O3 front-side and SiNx rear-side passivation. These dielectric stacks exhibit a low reflectance for conventional alkaline textured surfaces. The short circuit current density potential of the best hierarchical structured samples is 0.4 mA/cm2 higher when integrating the AM1.5G spectrum from 300nm to 1000 nm. Furthermore, our results suggest that structures with dimensions smaller than the thickness of an antireflection- and passivation (AR) layer cannot be covered conformal by the AR layer when using plasma-enhanced chemical vapor deposition. Thus, there seems to be a lower limit for the structure size, and wet chemical cleaning sequences – performed after plasma etching - have to be adjusted accordingly.
License of this version: CC BY-NC-ND 4.0 Unported
Document Type: Article
Publishing status: publishedVersion
Issue Date: 2015
Appears in Collections:An-Institute

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1 image of flag of Germany Germany 42 51.85%
2 image of flag of United States United States 17 20.99%
3 image of flag of China China 9 11.11%
4 image of flag of Vietnam Vietnam 4 4.94%
5 image of flag of Switzerland Switzerland 2 2.47%
6 image of flag of No geo information available No geo information available 1 1.23%
7 image of flag of Tanzania, United Republic of Tanzania, United Republic of 1 1.23%
8 image of flag of Taiwan Taiwan 1 1.23%
9 image of flag of Netherlands Netherlands 1 1.23%
10 image of flag of Iran, Islamic Republic of Iran, Islamic Republic of 1 1.23%
    other countries 2 2.47%

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