Development of a Humidity Sensor Element Based on Sputter-deposited thin ZnO-Layers

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Klaas, D.; Rein, M.; Wurz, M.C.; Rissing, L.: Development of a Humidity Sensor Element Based on Sputter-deposited thin ZnO-Layers. In: Procedia Technology 26 (2016), S. 27-34. DOI:

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Sum total of downloads: 83

A sensor concept for humidity measurement has been invented at the Institute of Micro Production Technology. The sensor element is manufactured on silicon oxide wafers with respect to the requirements of a new direct deposition process. This new process allows for thinner sensors with higher measuring accuracy. High purity 4N zinc oxide is used for the humidity sensing layer. Sensor properties and characteristics have been evaluated using X-ray diffraction and scanning electron microscopy. Finally, the evaluation electronic concept based on an embedded system with a field programmable gate array (FPGA) is presented.
License of this version: CC BY-NC-ND 4.0 Unported
Document Type: Article
Publishing status: publishedVersion
Issue Date: 2016
Appears in Collections:Fakultät für Maschinenbau

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pos. country downloads
total perc.
1 image of flag of Germany Germany 54 65.06%
2 image of flag of United States United States 11 13.25%
3 image of flag of China China 5 6.02%
4 image of flag of Indonesia Indonesia 3 3.61%
5 image of flag of No geo information available No geo information available 1 1.20%
6 image of flag of Norway Norway 1 1.20%
7 image of flag of Netherlands Netherlands 1 1.20%
8 image of flag of Latvia Latvia 1 1.20%
9 image of flag of Hungary Hungary 1 1.20%
10 image of flag of United Arab Emirates United Arab Emirates 1 1.20%
    other countries 4 4.82%

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