Flexible and Low-cost Production of Waveguide Based Integrated Photonic Devices

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Rahlves, M.: Flexible and Low-cost Production of Waveguide Based Integrated Photonic Devices. In: Procedia Technology 26 (2016), S. 309-315. DOI: https://doi.org/10.1016/j.protcy.2016.08.040

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Sum total of downloads: 137




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Abstract: 
We present a process to fabricate fully polymer based integrated optical devices which is based on maskless lithography and hot embossing. Using the maskless lithographic setup, we are able to create a hot embossing stamp in a flexible and fast manner. We demonstrate that our process is capable of creating linear optical waveguides, Y-splitters and Mach-Zehnder interferometers designed by preliminary optical simulations. The fabricated structures are analyzed with respect to optical smoothness and line edge roughness. In the future, our process will greatly enhance a fast design and fabrication of complex optical sensor structures.
License of this version: CC BY-NC-ND 4.0 Unported
Document Type: Article
Publishing status: publishedVersion
Issue Date: 2016
Appears in Collections:Fakultät für Maschinenbau

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pos. country downloads
total perc.
1 image of flag of Germany Germany 84 61.31%
2 image of flag of United States United States 24 17.52%
3 image of flag of China China 8 5.84%
4 image of flag of Indonesia Indonesia 3 2.19%
5 image of flag of France France 2 1.46%
6 image of flag of Canada Canada 2 1.46%
7 image of flag of Hungary Hungary 1 0.73%
8 image of flag of United Kingdom United Kingdom 1 0.73%
9 image of flag of Estonia Estonia 1 0.73%
10 image of flag of Switzerland Switzerland 1 0.73%
    other countries 10 7.30%

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