Numerical modeling of a MEMS actuator considering several magnetic force calculation methods

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Preisner, T.; Bolzmacher, C.; Gerber, A.; Bauer, K.; Quandt, E. et al.: Numerical modeling of a MEMS actuator considering several magnetic force calculation methods. In: COMPEL - The International Journal for Computation and Mathematics in Electrical and Electronic Engineering 30 (2011), Nr. 4, S. 1176-1188. DOI:

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Sum total of downloads: 188

Purpose: The purpose of this paper is to investigate the accuracy of different force calculation methods and their impact on mechanical deformations. For this purpose, a micrometer scaled actuator is considered, which consists of a micro-coil and of a permanent magnet (PM) embedded in a deformable elastomeric layer. Design/methodology/approach: For the magnetic field evaluation a hybrid numerical approach (finite element method/boundary element method (FEM/BEM) coupling and a FEM/BEM/Biot-Savart approach) is used, whereas FEM is implemented for the mechanical deformation analysis. Furthermore, for the magneto-mechanical coupling several force calculation methods, namely the Maxwell stress tensor, the virtual work approach and the equivalent magnetic sources methods, are considered and compared to each other and to laboratory measurements. Findings: The numerically evaluated magnetic forces and the measured ones are in good accordance with each other with respect to the normal force acting on the PM. Nevertheless, depending on the used method the tangential force components differ from each other, which leads to slightly different mechanical deformations. Research limitations/implications: Since the force calculations are compared to measurement data, it is possible to give a suggestion about their applicability. The mechanical behavior of the actuator due to the acting forces is solely calculated and therefore only an assumption concerning the deformation can be given. Originality/value: A new kind of micrometer scaled actuator is numerically investigated by using two different hybrid approaches for the magnetic field evaluation. Based on those, the results of several force calculation methods are compared to measurement data. Furthermore, a subsequent structural analysis is performed, which shows slightly different mechanical deformations depending on the used force calculation method. © Emerald Group Publishing Limited.
License of this version: Es gilt deutsches Urheberrecht. Das Dokument darf zum eigenen Gebrauch kostenfrei genutzt, aber nicht im Internet bereitgestellt oder an Außenstehende weitergegeben werden. Dieser Beitrag ist aufgrund einer (DFG-geförderten) Allianz- bzw. Nationallizenz frei zugänglich.
Document Type: Article
Publishing status: publishedVersion
Issue Date: 2011
Appears in Collections:Fakultät für Elektrotechnik und Informatik

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pos. country downloads
total perc.
1 image of flag of Germany Germany 121 64.36%
2 image of flag of United States United States 23 12.23%
3 image of flag of China China 16 8.51%
4 image of flag of Algeria Algeria 3 1.60%
5 image of flag of Canada Canada 3 1.60%
6 image of flag of Thailand Thailand 2 1.06%
7 image of flag of Korea, Republic of Korea, Republic of 2 1.06%
8 image of flag of Isle of Man Isle of Man 1 0.53%
9 image of flag of Spain Spain 1 0.53%
10 image of flag of Estonia Estonia 1 0.53%
    other countries 15 7.98%

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