This paper investigates process-induced variations of the open-circuit voltage (Voc) using voltage-dependent quantum efficiency measurements. By means of device modelling we show that this method is able to explain the Voc difference of two solar cells, even if they show identical electrical behaviour under short-circuit condition. This paper furthermore explains how the origin of Voc variations can be classified into emitter, base and rear of the solar cell. The simulation results have been experimentally verified with industrial-type passivated emitter and rear cells (PERC) cells made from p-type Czochralski wafers. The proposed analysis method is an attractive way for monitoring Voc variations of solar cells in industrial mass production since there is no need for specially prepared test structures. © 2017 The Authors. Published by Elsevier Ltd.