In recent years, the development of micro systems has been widely discussed inresearch articles concerning a decrease in size, an increase of complexity and thevariety of materials used. In contrast, manufacturing and especially assemblyprocesses of millimetre-sized products with high complexity did not play a significantrole. Conventional precision robots that provide adequate accuracies for microassembly are relatively large and expensive. These machines have to be operated inclean rooms, which results in high costs of maintenance. These days, the assemblytechnology of electronic production and conventional assembly robots is often nolonger suitable for the assembly of hybrid micro systems. The increasing gapbetween millimetre-sized products and the production machines has lead to a highproportion of manual assembly in the manufacturing process of microproducts.Assembly costs that sometimes account for up to 80 % of the costs of micro systemsretard the commercialisation and bulk production of these products. [1] Especially forsmall and medium-sized businesses, new concepts for flexible and lower-cost microassembly have to be found.