Towards a Highly Sensitive Piezoelectric Nano-Mass Detectio : A Model-Based Concept Study

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Twiefel, J.; Glukhovkoy, A.; de Wall, S.; Wurz, M.C.; Sehlmeyer, M. et al.: Towards a Highly Sensitive Piezoelectric Nano-Mass Detectio : A Model-Based Concept Study. In: Sensors 21 (2021), Nr. 7, 2533. DOI:

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Sum total of downloads: 21

The detection of exceedingly small masses still presents a large challenge, and even though very high sensitivities have been archived, the fabrication of those setups is still difficult. In this paper, a novel approach for a co-resonant mass detector is theoretically presented, where simple fabrication is addressed in this early concept phase. To simplify the setup, longitudinal and bending vibrations were combined for the first time. The direct integration of an aluminum nitride (AlN) piezoelectric element for simultaneous excitation and sensing further simplified the setup. The feasibility of this concept is shown by a model-based approach, and the underlying parameter dependencies are presented with an equivalent model. To include the geometrical and material aspects, a finite element model that supports the concept as a very promising approach for future nano-mass detectors is established.
License of this version: CC BY 4.0 Unported
Document Type: article
Publishing status: publishedVersion
Issue Date: 2021
Appears in Collections:Fakultät für Maschinenbau

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pos. country downloads
total perc.
1 image of flag of Germany Germany 12 57.14%
2 image of flag of United States United States 3 14.29%
3 image of flag of China China 3 14.29%
4 image of flag of Spain Spain 2 9.52%
5 image of flag of Iran, Islamic Republic of Iran, Islamic Republic of 1 4.76%

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