Twiefel, J.; Glukhovkoy, A.; de Wall, S.; Wurz, M.C.; Sehlmeyer, M. et al.: Towards a Highly Sensitive Piezoelectric Nano-Mass Detectio : A Model-Based Concept Study. In: Sensors 21 (2021), Nr. 7, 2533. DOI: https://doi.org/10.3390/s21072533
Zusammenfassung: | |
The detection of exceedingly small masses still presents a large challenge, and even though very high sensitivities have been archived, the fabrication of those setups is still difficult. In this paper, a novel approach for a co-resonant mass detector is theoretically presented, where simple fabrication is addressed in this early concept phase. To simplify the setup, longitudinal and bending vibrations were combined for the first time. The direct integration of an aluminum nitride (AlN) piezoelectric element for simultaneous excitation and sensing further simplified the setup. The feasibility of this concept is shown by a model-based approach, and the underlying parameter dependencies are presented with an equivalent model. To include the geometrical and material aspects, a finite element model that supports the concept as a very promising approach for future nano-mass detectors is established. | |
Lizenzbestimmungen: | CC BY 4.0 Unported |
Publikationstyp: | Article |
Publikationsstatus: | publishedVersion |
Erstveröffentlichung: | 2021 |
Die Publikation erscheint in Sammlung(en): | Fakultät für Maschinenbau |
Pos. | Land | Downloads | ||
---|---|---|---|---|
Anzahl | Proz. | |||
1 | Germany | 40 | 56,34% | |
2 | United States | 11 | 15,49% | |
3 | China | 8 | 11,27% | |
4 | Spain | 3 | 4,23% | |
5 | Russian Federation | 2 | 2,82% | |
6 | Taiwan | 1 | 1,41% | |
7 | Iran, Islamic Republic of | 1 | 1,41% | |
8 | Indonesia | 1 | 1,41% | |
9 | Denmark | 1 | 1,41% | |
10 | Belgium | 1 | 1,41% | |
andere | 2 | 2,82% |
Hinweis
Zur Erhebung der Downloadstatistiken kommen entsprechend dem „COUNTER Code of Practice for e-Resources“ international anerkannte Regeln und Normen zur Anwendung. COUNTER ist eine internationale Non-Profit-Organisation, in der Bibliotheksverbände, Datenbankanbieter und Verlage gemeinsam an Standards zur Erhebung, Speicherung und Verarbeitung von Nutzungsdaten elektronischer Ressourcen arbeiten, welche so Objektivität und Vergleichbarkeit gewährleisten sollen. Es werden hierbei ausschließlich Zugriffe auf die entsprechenden Volltexte ausgewertet, keine Aufrufe der Website an sich.