This paper aims to evaluate the working parameters and try to make an optimized use of the parameters which affect the measurement accuracy of airborne scanner. First, based on response surface method, three levels of configuration values of each parameter are selected, respectively, and 53 response surface experiments are designed. Second, three-dimensional coordinate errors of the scan points in each response surface experiment are calculated by comparing the coordinates measured by airborne scanner and common measuring apparatus. Third, by analyzing the experimental error through response surface method, the optimum configuration values of the parameters are determined. Meanwhile, the configuration characteristics and change laws of each parameter on three-dimensional coordinate errors are also realized. Results show that the most influencing parameters are flight height, flight speed, ground feature, aspect angle, scan frequency, and course angle. The optimum values for these parameters are found to be 46.14 m/s for flight speed, type 2 for ground feature, 88 Hz for scan frequency, 54.4° for course angle, 24.12° for aspect angle, and 215.92 m for flight height. The verification experiments showed that the predicted values from the response surface method are quite close to the experimental values, which validate the proposed approach.