Continuous detection of particles on a rotating substrate during thin film deposition

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Rüsseler, A.K.; Balasa, I.; Jensen, L.; Ristau, D.: Continuous detection of particles on a rotating substrate during thin film deposition. In: Proceedings of SPIE 10805 (2018), 108051X. DOI: https://doi.org/10.1117/12.2500210

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Sum total of downloads: 42




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Abstract: 
Particles, which contaminate the substrate during thin film deposition, are prone to cause irremovable defects and demand special attention in the field of high precision laser optics as they can lead to localized absorption and laser damage. In this contribution, we present a camera based fully in-vacuum device which continuously monitors the coating surface of a transparent test substrate under dark field illumination. We show the possibilities of this setup regarding the sensitivity to small particles (diameter 1 μm). As the first operational test of the particle monitor, singe layers of HfO 2 are grown on fused silica. By analyzing the evolution of the scattering intensity of the particles, we derive their position in the substrate-coating-system. Therefore, this in situ particle detection concept can deliver data on which process step is responsible for particle generation in multilayer films and aims to be a tool to minimize coating defects. © COPYRIGHT SPIE.
License of this version: Es gilt deutsches Urheberrecht. Das Dokument darf zum eigenen Gebrauch kostenfrei genutzt, aber nicht im Internet bereitgestellt oder an Außenstehende weitergegeben werden. Dieser Beitrag ist aufgrund einer (DFG-geförderten) Allianz- bzw. Nationallizenz frei zugänglich.
Document Type: conferenceObject
Publishing status: publishedVersion
Issue Date: 2018
Appears in Collections:Fakultät für Mathematik und Physik

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pos. country downloads
total perc.
1 image of flag of Germany Germany 25 59.52%
2 image of flag of United States United States 3 7.14%
3 image of flag of Russian Federation Russian Federation 3 7.14%
4 image of flag of India India 3 7.14%
5 image of flag of Czech Republic Czech Republic 3 7.14%
6 image of flag of United Kingdom United Kingdom 2 4.76%
7 image of flag of No geo information available No geo information available 1 2.38%
8 image of flag of Lithuania Lithuania 1 2.38%
9 image of flag of Switzerland Switzerland 1 2.38%

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