Joseph, A.; Lilienkamp, G.; Wietler, T.F.; Osten, H.J.
(Berlin [u.a.] : Springer, 2020)
The effects of nitrogen incorporation by high-dose ion implantation in epitaxial gadolinium oxide (Gd2O3) films on Si (111) followed by annealing have been investigated. The nitrogen content in the oxide layer was changed ...