Browsing by Subject "MEMS actuators"

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  • Preisner, Thomas; Bolzmacher, Christian; Gerber, Andreas; Bauer, Karin; Quandt, Eckhard; Mathis, Wolfgang (Bingley : Emerald Group Publishing Ltd., 2011)
    Purpose: The purpose of this paper is to investigate the accuracy of different force calculation methods and their impact on mechanical deformations. For this purpose, a micrometer scaled actuator is considered, which ...