Auflistung nach Schlagwort "Lift-off"

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  • Lift-off of free-standing layers in the kerfless porous silicon process 
    Kajari-Schröder, Sarah; Käsewieter, Jörg; Hensen, Jan; Brendel, Rolf (Amsterdam : Elsevier, 2013)
    We discuss the lift-off of free-standing epitaxially grown silicon layers from the porous silicon (PSI) process, which is a kerfless wafering technology. The lift-off is a crucial step in the PSI cycle. A high-porosity ...