Browsing by Subject "Cleaning sequences"

Sort by: Order: Results:

  • Kranz, Christopher; Wyczanowski, Sabrina; Baumann, Ulrike; Dorn, Silke; Queisser, Steffen; Schweckendiek, Jürgen; Pysch, Damian; Dullweber, Thorsten (London : Elsevier Ltd., 2014)
    In this paper, we investigate different industrial applicable cleaning sequences on test wafers and PERC solar cells in comparison to a laboratory type RCA clean. The cleaning sequences pSC1, HF/HCl, HF/O3 and HF/O3 show ...
  • Kranz, Christopher; Wyczanowski, Sabrina; Baumann, Ulrike; Weise, Katrin; Klein, Cornelia; Delahaye, Franck; Dullweber, Thorsten; Brendel, Rolf (Amsterdam : Elsevier, 2013)
    Industrial PERC cell process flows typically apply the polishing of the rear side after texturing as well as the edge isolation after POCl3 diffusion. In this paper, we present a novel single step polishing process which ...