A Combination of Ion Implantation and High-Temperature Annealing: The Origin of the 265 nm Absorption in AlN

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Peters, L.; Margenfeld, C.; Krügener, J.; Ronning, C.; Waag, A.: A Combination of Ion Implantation and High-Temperature Annealing: The Origin of the 265 nm Absorption in AlN. In: Physica status solidi : A, Applied research 220 (2023), Nr. 16, 2200485. DOI: https://doi.org/10.1002/pssa.202200485

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Abstract: 
The commonly observed absorption around 265 nm in AlN is hampering the outcoupling efficiency of light-emitting diodes (LEDs) emitting in the UV-C regime. Carbon impurities in the nitrogen sublattice (CN) of AlN are believed to be the origin of this absorption. A specially tailored experiment using a combination of ion implantation of boron, carbon, and neon with subsequent high-temperature annealing allows to separate the influence of intrinsic point defects and carbon impurities regarding this absorption. Herein, the presented results reveal the relevance of the intrinsic nitrogen-vacancy defect VN. This is in contradiction to the established explanation based on CN defects as the defect causing the 265 nm absorption and will be crucial for further UV-LED improvement. Finally, in this article, a new interpretation of the 265 nm absorption is introduced, which is corroborated by density functional theory (DFT) results from the past decade, which are reviewed and discussed based on the new findings.
License of this version: CC BY 4.0 Unported
Document Type: Article
Publishing status: publishedVersion
Issue Date: 2022
Appears in Collections:Fakultät für Elektrotechnik und Informatik

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1 image of flag of Germany Germany 30 66.67%
2 image of flag of United States United States 11 24.44%
3 image of flag of Ireland Ireland 1 2.22%
4 image of flag of Indonesia Indonesia 1 2.22%
5 image of flag of Greece Greece 1 2.22%
6 image of flag of China China 1 2.22%

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