- Home
- →
- Fakultäten
- →
- Fakultät für Maschinenbau
- →
- View Item
Download statistics - Document (COUNTER):
Overmeyer, L.; Olsen, E.; Hoffmann, G.-A.: Additive manufacturing of copper vertical interconnect accesses by laser processing. In: CIRP Annals 70 (2021), Nr. 1, S. 163-166. DOI: https://doi.org/10.1016/j.cirp.2021.03.006
Repository version
Selected time period:
Sum total of downloads: 88
| Abstract: | |
This paper introduces a new manufacturing process for vertical interconnect accesses (VIA). In contrast to industrially established VIA metallization technologies, the presented approach takes place without any chemical plating by combining copper ink and epoxy insulator coating with CO2 laser processing for VIA drilling and copper ink sintering. The minimum VIA resistances are less than 50 mΩ, fitting the theoretically calculated value. A laboratory application scenario testing a 10 × 10 contact pad array with a pitch of 800 µm successfully demonstrates routing across five printed metallization layers, including 128 blind and 112 buried VIA. © 2021 The Authors | |
| License of this version: | CC BY 4.0 Unported |
| Document Type: | Article |
| Publishing status: | publishedVersion |
| Issue Date: | 2021 |
| Appears in Collections: | Fakultät für Maschinenbau |
distribution of downloads over the selected time period:
downloads by country:
| pos. | country | downloads | ||
|---|---|---|---|---|
| total | perc. | |||
| 1 |  |
Germany | 42 | 47.73% |
| 2 |  |
United States | 18 | 20.45% |
| 3 |  |
China | 8 | 9.09% |
| 4 |  |
Czech Republic | 5 | 5.68% |
| 5 |  |
Israel | 3 | 3.41% |
| 6 |  |
Hong Kong | 2 | 2.27% |
| 7 |  |
United Kingdom | 2 | 2.27% |
| 8 |  |
Taiwan | 1 | 1.14% |
| 9 |  |
Sweden | 1 | 1.14% |
| 10 |  |
Russian Federation | 1 | 1.14% |
| other countries | 5 | 5.68% | ||
Further download figures and rankings:
Hinweis
Zur Erhebung der Downloadstatistiken kommen entsprechend dem „COUNTER Code of Practice for e-Resources“ international anerkannte Regeln und Normen zur Anwendung. COUNTER ist eine internationale Non-Profit-Organisation, in der Bibliotheksverbände, Datenbankanbieter und Verlage gemeinsam an Standards zur Erhebung, Speicherung und Verarbeitung von Nutzungsdaten elektronischer Ressourcen arbeiten, welche so Objektivität und Vergleichbarkeit gewährleisten sollen. Es werden hierbei ausschließlich Zugriffe auf die entsprechenden Volltexte ausgewertet, keine Aufrufe der Website an sich.