Laser-dilatometer calibration using a single-crystal silicon sample

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Hamann, I.; Sanjuan, J.; Spannagel, R.; Gohlkeb, M.; Wanner, G. et al.: Laser-dilatometer calibration using a single-crystal silicon sample. In: International Journal of Optomechatronics 13 (2019), Nr. 1, S. 18-29. DOI: https://doi.org/10.1080/15599612.2019.1587117

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Sum total of downloads: 95




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Abstract: 
Marginal changes in geometrical dimensions due to temperature changes affect the performance of optical instruments. Highly dimensionally stable materials can minimize these effects since they offer low coefficients of thermal expansion (CTE). Our dilatometer, based on heterodyne interferometry, is able to determine the CTE in 10−8 K−1 range. Here, we present the improved interferometer performance using angular measurements via differential wavefront sensing to correct for tilt-to-length coupling. The setup was tested by measuring the CTE of a single-crystal silicon at 285 K. Results are in good agreement with the reported values and show a bias of less than 1%.
License of this version: CC BY 4.0 Unported
Document Type: Article
Publishing status: publishedVersion
Issue Date: 2019
Appears in Collections:Fakultät für Mathematik und Physik

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pos. country downloads
total perc.
1 image of flag of Germany Germany 47 49.47%
2 image of flag of China China 18 18.95%
3 image of flag of United States United States 12 12.63%
4 image of flag of Iran, Islamic Republic of Iran, Islamic Republic of 3 3.16%
5 image of flag of No geo information available No geo information available 2 2.11%
6 image of flag of Russian Federation Russian Federation 2 2.11%
7 image of flag of Ireland Ireland 2 2.11%
8 image of flag of Indonesia Indonesia 2 2.11%
9 image of flag of United Kingdom United Kingdom 2 2.11%
10 image of flag of Czech Republic Czech Republic 1 1.05%
    other countries 4 4.21%

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