Multilayer etching for kerf-free solar cells from macroporous silicon

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Schäfer, S.; Ernst, M.; Kajari-Schröder, S.; Brendel, R.: Multilayer etching for kerf-free solar cells from macroporous silicon. In: Energy Procedia 38 (2013), S. 933-941. DOI: https://doi.org/10.1016/j.egypro.2013.07.367

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Sum total of downloads: 243




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Abstract: 
Kerf-free techniques for subdividing a single thick crystalline Si wafer into a multitude of thin Si layers have a large potential for cost reductions. In this paper, we explore pore formation in Si for separating many 18 μm-thick surface-textured layers from a thick wafer with a single etching process. We demonstrate the fabrication and separation of four macroporous Si layers in a single etching step. Generating many instead of single macroporous layers per etching step improves the economics of the macroporous Si process. We present our etching process that maintains the pore pattern defined by photolithography even after etching many absorber and separation layers.
License of this version: CC BY-NC-ND 3.0 Unported
Document Type: Article
Publishing status: publishedVersion
Issue Date: 2013
Appears in Collections:Fakultät für Mathematik und Physik

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pos. country downloads
total perc.
1 image of flag of Germany Germany 190 78.19%
2 image of flag of United States United States 25 10.29%
3 image of flag of China China 12 4.94%
4 image of flag of Japan Japan 5 2.06%
5 image of flag of Ukraine Ukraine 4 1.65%
6 image of flag of Tanzania, United Republic of Tanzania, United Republic of 1 0.41%
7 image of flag of Taiwan Taiwan 1 0.41%
8 image of flag of Malaysia Malaysia 1 0.41%
9 image of flag of Hungary Hungary 1 0.41%
10 image of flag of United Kingdom United Kingdom 1 0.41%
    other countries 2 0.82%

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