Fluiddynamic planar drive with unrestrained rotational degree of freedom

Abstract

In this paper, a new planar drive system for the use in small machine tools is introduced. It is based on an innovative fluid dynamic drive principle, which generates thrust forces by the deflection of fluid jets on flow grids integrated into the slide. In addition to the translational movements in x- and y-direction, this drive allows unlimited rotation around the z-axis in any position. Advantages are the reduced number of necessary machine components and a frictionless movement by magnetically pre-stressed, aerostatic bearing. The working principle of the drive is explained and its geometrical constraints are investigated. The arrangement of the nozzles and the design of the grid profiles are optimized. Finally, the technical implementation of the drive is presented.