dc.identifier.uri |
http://dx.doi.org/10.15488/1769 |
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dc.identifier.uri |
http://www.repo.uni-hannover.de/handle/123456789/1794 |
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dc.contributor.author |
Rezem, Maher
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dc.contributor.author |
Kelb, Christian
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dc.contributor.author |
Günther, Axel
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dc.contributor.author |
Rahlves, Maik
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dc.contributor.author |
Reithmeier, Eduard
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dc.contributor.author |
Roth, Bernhard
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dc.contributor.editor |
He, Sailing
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dc.contributor.editor |
Lee, El-Hang
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dc.contributor.editor |
Eldada, Louay A.
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dc.date.accessioned |
2017-08-08T11:41:49Z |
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dc.date.available |
2017-08-08T11:41:49Z |
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dc.date.issued |
2016 |
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dc.identifier.citation |
Rezem, M.; Kelb, C.; Günther, A.; Rahlves, M.; Reithmeier, E. et al.: Low-cost fabrication of optical waveguides, interconnects and sensing structures on all-polymer-based thin foils. In: Proceedings of SPIE - The International Society for Optical Engineering 9751 (2016), 975112. DOI: https://doi.org/10.1117/12.2213182 |
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dc.description.abstract |
Micro-optical sensors based on optical waveguides are widely used to measure temperature, force and strain but also to detect biological and chemical substances such as explosives or toxins. While optical micro-sensors based on silicon technology require complex and expensive process technologies, a new generation of sensors based completely on polymers offer advantages especially in terms of low-cost and fast production techniques. We have developed a process to integrate micro-optical components such as embedded waveguides and optical interconnects into polymer foils with a thickness well below one millimeter. To enable high throughput production, we employ hot embossing technology, which is capable of reel-to-reel fabrication with a surface roughness in the optical range. For the waveguide fabrication, we used the thermoplastic polymethylmethacrylate (PMMA) as cladding and several optical adhesives as core materials. The waveguides are characterized with respect to refractive indices and propagation losses. We achieved propagation losses are as low as 0.3 dB/cm. Furthermore, we demonstrate coupling structures and their fabrication especially suited to integrate various light sources such as vertical-cavity surface-emitting lasers (VCSEL) and organic light emitting diodes (OLED) into thin polymer foils. Also, we present a concept of an all-polymer and waveguide based deformation sensor based on intensity modulation, which can be fabricated by utilizing our process. For future application, we aim at a low-cost and high-throughput reel-to-reel production process enabling the fabrication of large sensor arrays or disposable single-use sensing structures, which will open optical sensing to a large variety of application fields ranging from medical diagnosis to automotive sensing. © 2016 SPIE. |
eng |
dc.description.sponsorship |
DFG/CRC/PlanOS |
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dc.language.iso |
eng |
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dc.publisher |
Bellingham, Wash. : SPIE |
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dc.relation.ispartof |
Smart Photonic and Optoelectronic Integrated Circuits XVIII : 16-18 February 2016, San Francisco, California, United States |
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dc.relation.ispartofseries |
Proceedings of SPIE 9751 (2016) |
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dc.rights |
Es gilt deutsches Urheberrecht. Das Dokument darf zum eigenen Gebrauch kostenfrei genutzt, aber nicht im Internet bereitgestellt oder an Außenstehende weitergegeben werden. Dieser Beitrag ist aufgrund einer (DFG-geförderten) Allianz- bzw. Nationallizenz frei zugänglich. |
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dc.subject |
Hot embossing |
eng |
dc.subject |
Integrated photonics |
eng |
dc.subject |
Optical waveguide |
eng |
dc.subject |
Polymer optics |
eng |
dc.subject |
Coremaking |
eng |
dc.subject |
Costs |
eng |
dc.subject |
Diagnosis |
eng |
dc.subject |
Electric losses |
eng |
dc.subject |
Explosives detection |
eng |
dc.subject |
Fabrication |
eng |
dc.subject |
Integrated circuit interconnects |
eng |
dc.subject |
Integrated circuits |
eng |
dc.subject |
Integrated optoelectronics |
eng |
dc.subject |
Light |
eng |
dc.subject |
Light emitting diodes |
eng |
dc.subject |
Light sources |
eng |
dc.subject |
Microoptics |
eng |
dc.subject |
Microsensors |
eng |
dc.subject |
Optical waveguides |
eng |
dc.subject |
Organic lasers |
eng |
dc.subject |
Organic light emitting diodes (OLED) |
eng |
dc.subject |
Photonics |
eng |
dc.subject |
Polymers |
eng |
dc.subject |
Polymethyl methacrylates |
eng |
dc.subject |
Reconfigurable hardware |
eng |
dc.subject |
Reels |
eng |
dc.subject |
Refractive index |
eng |
dc.subject |
Surface emitting lasers |
eng |
dc.subject |
Surface roughness |
eng |
dc.subject |
Throughput |
eng |
dc.subject |
Waveguides |
eng |
dc.subject |
Hot-embossing |
eng |
dc.subject |
Integrated photonics |
eng |
dc.subject |
Intensity modulations |
eng |
dc.subject |
Micro-optical components |
eng |
dc.subject |
Polymer optics |
eng |
dc.subject |
Production techniques |
eng |
dc.subject |
Reel-to-reel production |
eng |
dc.subject |
Waveguide fabrication |
eng |
dc.subject |
Photonic integration technology |
eng |
dc.subject.classification |
Konferenzschrift |
ger |
dc.subject.ddc |
530 | Physik
|
ger |
dc.title |
Low-cost fabrication of optical waveguides, interconnects and sensing structures on all-polymer-based thin foils |
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dc.type |
BookPart |
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dc.type |
Text |
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dc.relation.essn |
1996-756X |
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dc.relation.isbn |
978-1-62841-986-3 |
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dc.relation.issn |
0277-786X |
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dc.relation.doi |
https://doi.org/10.1117/12.2213182 |
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dc.bibliographicCitation.volume |
9751 |
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dc.bibliographicCitation.firstPage |
975112 |
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dc.description.version |
publishedVersion |
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tib.accessRights |
frei zug�nglich |
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