Veith, B.; Werner, F.; Zielke, D.; Brendel, Rolf; Schmidt, Jan: Comparison of the thermal stability of single Al2O3 layers and Al2O3/SiNx stacks for the surface passiviation of silicon. In: Energy Procedia 8 (2011), S. 307-312. DOI: https://doi.org/10.1016/j.egypro.2011.06.141
Abstract: | |
We measure surface recombination velocities (SRVs) below 10 cm/s on low-resistivity (1.4 Ωcm) p-type crystalline silicon wafers passivated with plasma-assisted and thermal atomic layer deposited (ALD) aluminium oxide (Al2O3) films. Ultrathin Al2O3 films (< 5 nm) are particularly relevant for the implementation into solar cells, as the deposition rate of the ALD process is very low compared to e.g. plasma-enhanced chemical vapor deposition (PECVD). Hence, we examine the passivation quality of a stack consisting of an ultrathin Al2O 3 passivation layer deposited by ALD and a SiNx capping layer deposited by PECVD. Our experiments show a substantial improvement of the thermal stability during firing at 810°C for the Al2O 3/SiNx stacks compared to a single Al2O 3 layer. We report on a 'regeneration effect' observed for Al 2O3 single layers after firing, where the degraded passivation is significantly improved after annealing at 400°C and also by illumination at room temperature using a halogen lamp. Nevertheless, for Al 2O3/SiNx stacks we measure SRVs < 15 cm/s after firing, whereas for Al2O3 single layers the regenerated SRVs are in the range of 10-30 cm/s. Al2O 3/SiNx stacks are hence ideally suited for the implementation into industrial-type silicon solar cells, although 'regenerated' Al2O3 single layers should result in a comparable cell performance. | |
License of this version: | CC BY-NC-ND 3.0 Unported |
Document Type: | Article |
Publishing status: | publishedVersion |
Issue Date: | 2011 |
Appears in Collections: | Fakultät für Mathematik und Physik |
pos. | country | downloads | ||
---|---|---|---|---|
total | perc. | |||
1 | Germany | 206 | 50.74% | |
2 | United States | 72 | 17.73% | |
3 | China | 29 | 7.14% | |
4 | Korea, Republic of | 13 | 3.20% | |
5 | Netherlands | 9 | 2.22% | |
6 | France | 9 | 2.22% | |
7 | No geo information available | 7 | 1.72% | |
8 | Mexico | 7 | 1.72% | |
9 | India | 5 | 1.23% | |
10 | Spain | 5 | 1.23% | |
other countries | 44 | 10.84% |
Hinweis
Zur Erhebung der Downloadstatistiken kommen entsprechend dem „COUNTER Code of Practice for e-Resources“ international anerkannte Regeln und Normen zur Anwendung. COUNTER ist eine internationale Non-Profit-Organisation, in der Bibliotheksverbände, Datenbankanbieter und Verlage gemeinsam an Standards zur Erhebung, Speicherung und Verarbeitung von Nutzungsdaten elektronischer Ressourcen arbeiten, welche so Objektivität und Vergleichbarkeit gewährleisten sollen. Es werden hierbei ausschließlich Zugriffe auf die entsprechenden Volltexte ausgewertet, keine Aufrufe der Website an sich.