Engineering under protective atmospheres or in vacuum allows the production of materials and components, where the absence of oxygen is an essential requirement for a successful processing. Ideally, joining or coating of (and with) metallic materials needs oxide free material surfaces, in order to achieve durable joints or coatings. Using the established technology of brazing in controlled atmosphere, fundamental physical mechanisms for deoxidation of metal surfaces are presented and the role of oxygen and water residue in the process atmosphere is analyzed. Furthermore, the doping of gases with monosilane for generating virtually oxygen-free process atmospheres is introduced and its advantages for an oxygen-free production are discussed. © 2019, The Author(s).