Auflistung nach Schlagwort "Ultra-thin"

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  • Comparison of the thermal stability of single Al2O3 layers and Al2O3/SiNx stacks for the surface passiviation of silicon 
    Veith, Boris; Werner, Florian; Zielke, Dimitri; Brendel, Rolf; Schmidt, Jan (Amsterdam : Elsevier BV, 2011)
    We measure surface recombination velocities (SRVs) below 10 cm/s on low-resistivity (1.4 Ωcm) p-type crystalline silicon wafers passivated with plasma-assisted and thermal atomic layer deposited (ALD) aluminium oxide (Al2O3) ...
  • Failure stress of epitaxial silicon thin films 
    Käsewieter, Jörg; Kajari-Schröder, Sarah; Niendorf, Thomas; Brendel, Rolf (Amsterdam : Elsevier, 2013)
    Ultra-thin silicon wafer have to withstand forces and stresses during handling procedures without breakage. Here we investigate the failure stresses of ?30 ?m thick monocrystalline silicon films produced with the porous ...